Resonant MEMS : fundamentals, implementation and application /

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Bibliographic Details
Other Authors:	Brand, Oliver (Editor)
Format:	Electronic eBook
Language:	English
Published:	Weinheim, Baden-Württemberg, Germany : Wiley-VCH, 2015.
Series:	Advanced micro & nanosystems.
Subjects:	Microelectromechanical systems > Design and construction. Microfabrication. Resonance. Electronic books.
Online Access:	An electronic book accessible through the World Wide Web; click to view
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