Resonant MEMS : fundamentals, implementation and application /
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| Other Authors: | |
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| Format: | Electronic eBook |
| Language: | English |
| Published: |
Weinheim, Baden-Württemberg, Germany :
Wiley-VCH,
2015.
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| Series: | Advanced micro & nanosystems.
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| Subjects: | |
| Online Access: | An electronic book accessible through the World Wide Web; click to view |
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