Introduction to microfabrication

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Bibliographic Details
Main Author:	Franssila, Sami
Corporate Author:	ebrary, Inc
Format:	Electronic eBook
Language:	English
Published:	Chichester, West Sussex, England ; Hoboken, NJ : John Wiley & Sons, 2010.
Edition:	2nd ed.
Subjects:	Microelectromechanical systems. Electronic apparatus and appliances. Microfabrication. Electronic books.
Online Access:	An electronic book accessible through the World Wide Web; click to view
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