Resonant MEMS : fundamentals, implementation and application /
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| Médium: | Elektronický zdroj E-kniha |
| Jazyk: | angličtina |
| Vydáno: |
Weinheim, Baden-Württemberg, Germany :
Wiley-VCH,
2015.
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| Edice: | Advanced micro & nanosystems.
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| Témata: | |
| On-line přístup: | An electronic book accessible through the World Wide Web; click to view |
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Podobné jednotky: Resonant MEMS :
- Introduction to microfabrication
- Materials and failures in MEMS and NEMS /
- Understanding MEMS : principles and applications /
- Hermeticity testing of MEMS and microelectronic packages /
- Analysis and design principles of MEMS devices
- Material science and MEMS production : selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China /