Digital holography for MEMS and microsystem metrology

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Bibliographic Details
Corporate Author:	ebrary, Inc
Other Authors:	Asundi, Anand
Format:	Electronic eBook
Language:	English
Published:	Chichester, West Sussex, U.K. ; Hoboken, N.J. : Wiley, 2011.
Series:	Wiley microsystem and nanotechnology series.
Subjects:	Microelectromechanical systems > Measurement. Microelectronics > Measurement. Holographic testing. Image processing > Digital techniques. Electronic books.
Online Access:	An electronic book accessible through the World Wide Web; click to view
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