Digital holography for MEMS and microsystem metrology
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| Corporate Author: | |
|---|---|
| Other Authors: | |
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Chichester, West Sussex, U.K. ; Hoboken, N.J. :
Wiley,
2011.
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| Series: | Wiley microsystem and nanotechnology series.
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| Subjects: | |
| Online Access: | An electronic book accessible through the World Wide Web; click to view |
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| 020 | |z 9780470978696 (cloth) | ||
| 020 | |z 9781119997306 (ePDF) | ||
| 020 | |z 9781119997290 (oBook) | ||
| 020 | |z 9781119972785 (ePub) | ||
| 020 | |z 9781119972792 (Mobi) | ||
| 020 | |z 9781119997306 (e-book) | ||
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| 040 | |a CaPaEBR |c CaPaEBR | ||
| 050 | 1 | 4 | |a TK7875 |b .D54 2011eb |
| 082 | 0 | 4 | |a 621.381 |2 22 |
| 245 | 0 | 0 | |a Digital holography for MEMS and microsystem metrology |h [electronic resource] / |c edited by Anand Asundi. |
| 260 | |a Chichester, West Sussex, U.K. ; |a Hoboken, N.J. : |b Wiley, |c 2011. | ||
| 300 | |a xxii, 205 p. : |b ill., port. | ||
| 490 | 1 | |a The Wiley microsystem and nanotechnology series | |
| 504 | |a Includes bibliographical references and index. | ||
| 533 | |a Electronic reproduction. |b Palo Alto, Calif. : |c ebrary, |d 2011. |n Available via World Wide Web. |n Access may be limited to ebrary affiliated libraries. | ||
| 650 | 0 | |a Microelectromechanical systems |x Measurement. | |
| 650 | 0 | |a Microelectronics |x Measurement. | |
| 650 | 0 | |a Holographic testing. | |
| 650 | 0 | |a Image processing |x Digital techniques. | |
| 655 | 7 | |a Electronic books. |2 local | |
| 700 | 1 | |a Asundi, Anand. | |
| 710 | 2 | |a ebrary, Inc. | |
| 830 | 0 | |a Wiley microsystem and nanotechnology series. | |
| 856 | 4 | 0 | |u http://site.ebrary.com/lib/daystar/Doc?id=10484809 |z An electronic book accessible through the World Wide Web; click to view |
| 908 | |a 170314 | ||
| 942 | 0 | 0 | |c EB |
| 999 | |c 126592 |d 126592 | ||