Resonant MEMS : fundamentals, implementation and application /
Saved in:
| Other Authors: | |
|---|---|
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Weinheim, Baden-Württemberg, Germany :
Wiley-VCH,
2015.
|
| Series: | Advanced micro & nanosystems.
|
| Subjects: | |
| Online Access: | An electronic book accessible through the World Wide Web; click to view |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
MARC
| LEADER | 00000nam a2200000 i 4500 | ||
|---|---|---|---|
| 001 | 0000193603 | ||
| 005 | 20171002070003.0 | ||
| 006 | m o d | ||
| 007 | cr cn||||||||| | ||
| 008 | 150521t20152015gw a ob 001 0 eng d | ||
| 020 | |z 9783527335459 | ||
| 020 | |a 9783527676361 (e-book) | ||
| 035 | |a (CaPaEBR)ebr11052833 | ||
| 040 | |a CaPaEBR |b eng |e rda |e pn |c CaPaEBR | ||
| 050 | 1 | 4 | |a TK7875 |b .R476 2015eb |
| 082 | 0 | 4 | |a 621.381 |2 23 |
| 245 | 0 | 0 | |a Resonant MEMS : |b fundamentals, implementation and application / |c edited by Oliver Brand [and three others]. |
| 264 | 1 | |a Weinheim, Baden-Württemberg, Germany : |b Wiley-VCH, |c 2015. | |
| 264 | 4 | |c ©2015 | |
| 300 | |a 1 online resource (512 pages) : |b illustrations (some color), graphs. | ||
| 336 | |a text |2 rdacontent | ||
| 337 | |a computer |2 rdamedia | ||
| 338 | |a online resource |2 rdacarrier | ||
| 490 | 1 | |a Advanced Micro & Nanosystems | |
| 504 | |a Includes bibliographical references at the end of each chapters and index. | ||
| 588 | |a Description based on online resource; title from PDF title page (ebrary, viewed May 21, 2015). | ||
| 590 | |a Electronic reproduction. Palo Alto, Calif. : ebrary, 2015. Available via World Wide Web. Access may be limited to ebrary affiliated libraries. | ||
| 650 | 0 | |a Microelectromechanical systems |x Design and construction. | |
| 650 | 0 | |a Microfabrication. | |
| 650 | 0 | |a Resonance. | |
| 655 | 0 | |a Electronic books. | |
| 700 | 1 | |a Brand, Oliver, |e editor. | |
| 776 | 0 | 8 | |i Print version: |t Resonant MEMS : fundamentals, implementation and application. |d Weinheim, Baden-Württemberg, Germany : Wiley-VCH, c2015 |h xxv, 483 pages |k Advanced micro & nanosystems. |z 9783527335459 |
| 797 | 2 | |a ebrary. | |
| 830 | 0 | |a Advanced micro & nanosystems. | |
| 856 | 4 | 0 | |u http://site.ebrary.com/lib/daystar/Doc?id=11052833 |z An electronic book accessible through the World Wide Web; click to view |
| 908 | |a 170314 | ||
| 942 | 0 | 0 | |c EB |
| 999 | |c 182736 |d 182736 | ||