Resonant MEMS : fundamentals, implementation and application /
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Drugi avtorji: | |
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Format: | Elektronski eKnjiga |
Jezik: | angleščina |
Izdano: |
Weinheim, Baden-Württemberg, Germany :
Wiley-VCH,
2015.
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Serija: | Advanced micro & nanosystems.
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Teme: | |
Online dostop: | An electronic book accessible through the World Wide Web; click to view |
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Fizični opis: | 1 online resource (512 pages) : illustrations (some color), graphs. |
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Bibliografija: | Includes bibliographical references at the end of each chapters and index. |
ISBN: | 9783527676361 (e-book) |