Resonant MEMS : fundamentals, implementation and application /
Gardado en:
| Outros autores: | |
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| Formato: | Electrónico eBook |
| Idioma: | inglés |
| Publicado: |
Weinheim, Baden-Württemberg, Germany :
Wiley-VCH,
2015.
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| Series: | Advanced micro & nanosystems.
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| Subjects: | |
| Acceso en liña: | An electronic book accessible through the World Wide Web; click to view |
| Tags: |
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| Descrición Física: | 1 online resource (512 pages) : illustrations (some color), graphs. |
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| Bibliografía: | Includes bibliographical references at the end of each chapters and index. |
| ISBN: | 9783527676361 (e-book) |