Resonant MEMS : fundamentals, implementation and application /
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| Andre forfattere: | |
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| Format: | Electronisk eBog |
| Sprog: | engelsk |
| Udgivet: |
Weinheim, Baden-Württemberg, Germany :
Wiley-VCH,
2015.
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| Serier: | Advanced micro & nanosystems.
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| Fag: | |
| Online adgang: | An electronic book accessible through the World Wide Web; click to view |
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| Fysisk beskrivelse: | 1 online resource (512 pages) : illustrations (some color), graphs. |
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| Bibliografi: | Includes bibliographical references at the end of each chapters and index. |
| ISBN: | 9783527676361 (e-book) |