Resonant MEMS : fundamentals, implementation and application /
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| 格式: | 電子 電子書 |
| 語言: | 英语 |
| 出版: |
Weinheim, Baden-Württemberg, Germany :
Wiley-VCH,
2015.
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| 叢編: | Advanced micro & nanosystems.
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| 主題: | |
| 在線閱讀: | An electronic book accessible through the World Wide Web; click to view |
| 標簽: |
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| 實物描述: | 1 online resource (512 pages) : illustrations (some color), graphs. |
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| 參考書目: | Includes bibliographical references at the end of each chapters and index. |
| ISBN: | 9783527676361 (e-book) |