Resonant MEMS : fundamentals, implementation and application /
I tiakina i:
| Ētahi atu kaituhi: | |
|---|---|
| Hōputu: | Tāhiko īPukapuka |
| Reo: | Ingarihi |
| I whakaputaina: |
Weinheim, Baden-Württemberg, Germany :
Wiley-VCH,
2015.
|
| Rangatū: | Advanced micro & nanosystems.
|
| Ngā marau: | |
| Urunga tuihono: | An electronic book accessible through the World Wide Web; click to view |
| Ngā Tūtohu: |
Tāpirihia he Tūtohu
Kāore He Tūtohu, Me noho koe te mea tuatahi ki te tūtohu i tēnei pūkete!
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