Resonant MEMS : fundamentals, implementation and application /
Furkejuvvon:
| Eará dahkkit: | |
|---|---|
| Materiálatiipa: | Elektrovnnalaš E-girji |
| Giella: | eaŋgalasgiella |
| Almmustuhtton: |
Weinheim, Baden-Württemberg, Germany :
Wiley-VCH,
2015.
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| Ráidu: | Advanced micro & nanosystems.
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| Fáttát: | |
| Liŋkkat: | An electronic book accessible through the World Wide Web; click to view |
| Fáddágilkorat: |
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