Resonant MEMS : fundamentals, implementation and application /

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Bibliografiske detaljer
Andre forfattere:	Brand, Oliver (Editor)
Format:	Electronisk eBog
Sprog:	engelsk
Udgivet:	Weinheim, Baden-Württemberg, Germany : Wiley-VCH, 2015.
Serier:	Advanced micro & nanosystems.
Fag:	Microelectromechanical systems > Design and construction. Microfabrication. Resonance. Electronic books.
Online adgang:	An electronic book accessible through the World Wide Web; click to view
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