Sputtering materials for VLSI and thin film devices /
Guardat en:
| Autor principal: | |
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| Format: | Electrònic eBook |
| Idioma: | anglès |
| Publicat: |
Oxford ; Boston :
William Andrew Publishing,
2014.
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| Edició: | First edition. |
| Matèries: | |
| Accés en línia: | An electronic book accessible through the World Wide Web; click to view |
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- Electronic materials science