Low-k nanoporous interdielectrics materials, thin film fabrications, structures and properties /

I tiakina i:

Ngā taipitopito rārangi puna kōrero
Kaituhi matua:	Ree, Moonhor
Kaituhi rangatōpū:	ebrary, Inc
Ētahi atu kaituhi:	Yoon, Jinhwan, Heo, Kyuyoung
Hōputu:	Tāhiko īPukapuka
Reo:	Ingarihi
I whakaputaina:	Hauppauge, N.Y. : Nova Science Publishers, c2010.
Rangatū:	Nanotechnology science and technology series.
Ngā marau:	Dielectric films. Microelectronics > Materials. Porous materials. Interconnects (Integrated circuit technology) Electronic books.
Urunga tuihono:	An electronic book accessible through the World Wide Web; click to view
Ngā Tūtohu:	Tāpirihia he Tūtohu Kāore He Tūtohu, Me noho koe te mea tuatahi ki te tūtohu i tēnei pūkete!

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