Silicon science and advanced micro-device engineering I selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan /

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Bibliographic Details
Corporate Authors:	International Symposium on Silicon Science Kiryū-shi, Japan, Gunma Daigaku. International Education and Research Center for Silicon Science, Gunma Daigaku. Advanced Technology Research Center, ebrary, Inc, International Conference on Advanced Micro-Device Engineering
Other Authors:	Hanaizumi, Osamu, Unno, Masafumi
Format:	Electronic Conference Proceeding eBook
Language:	English
Published:	Stafa-Zurich ; Enfield, N.H. : Trans Tech Publications, 2011.
Series:	Key engineering materials, v. 459
Subjects:	Silicon > Congresses. Nanostructures > Congresses. Microelectronics > Congresses. Electronic books.
Online Access:	An electronic book accessible through the World Wide Web; click to view
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