Silicon science and advanced micro-device engineering II selected, peer reviewed papers from the 6th International Symposium on Silicon Science and 2nd International Conference on Advanced Micro-Device Engineering (ISSS&AMDE 2010), December 9-10, 2010, Kiryu City Performing Arts Center, Kiryu, Japan /

Bibliographische Detailangaben

Körperschaften:	International Symposium on Silicon Science Kiryū-shi, Japan, ebrary, Inc, International Conference on Advanced Micro-Device Engineering
Weitere Verfasser:	Hanaizumi, Osamu, Unno, Masafumi, Miura, Kenta
Format:	Elektronisch Tagungsbericht E-Book
Sprache:	Englisch
Veröffentlicht:	Durnten-Zurich : Trans Tech Publications, 2012.
Schriftenreihe:	Key engineering materials, v. 497
Schlagworte:	Silicon > Congresses. Nanostructures > Congresses. Microelectronics > Congresses. Electronic books.
Online-Zugang:	An electronic book accessible through the World Wide Web; click to view
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