Silicon science and advanced micro-device engineering II selected, peer reviewed papers from the 6th International Symposium on Silicon Science and 2nd International Conference on Advanced Micro-Device Engineering (ISSS&AMDE 2010), December 9-10, 2010, Kiryu City Performing Arts Center, Kiryu, Japan /
Enregistré dans:
| Collectivités auteurs: | , , |
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| Autres auteurs: | , , |
| Format: | Électronique Actes de congrès eBook |
| Langue: | anglais |
| Publié: |
Durnten-Zurich :
Trans Tech Publications,
2012.
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| Collection: | Key engineering materials,
v. 497 |
| Sujets: | |
| Accès en ligne: | An electronic book accessible through the World Wide Web; click to view |
| Tags: |
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| Description matérielle: | 311 p. : ill. (some col.). |
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| Bibliographie: | Includes bibliographical references and indexes. |
| ISSN: | 1662-9809 ; |