Silicon science and advanced micro-device engineering II selected, peer reviewed papers from the 6th International Symposium on Silicon Science and 2nd International Conference on Advanced Micro-Device Engineering (ISSS&AMDE 2010), December 9-10, 2010, Kiryu City Performing Arts Center, Kiryu, Japan /

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Bibliographic Details
Corporate Authors: International Symposium on Silicon Science Kiryū-shi, Japan, ebrary, Inc, International Conference on Advanced Micro-Device Engineering
Other Authors: Hanaizumi, Osamu, Unno, Masafumi, Miura, Kenta
Format: Electronic Conference Proceeding eBook
Language:English
Published: Durnten-Zurich : Trans Tech Publications, 2012.
Series:Key engineering materials, v. 497
Subjects:
Online Access:An electronic book accessible through the World Wide Web; click to view
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040 |a CaPaEBR  |c CaPaEBR 
050 1 4 |a TK7871.15.S55  |b H36 2010eb 
111 2 |a International Symposium on Silicon Science  |n (6th :  |d 2010 :  |c Kiryū-shi, Japan) 
245 1 0 |a Silicon science and advanced micro-device engineering II  |h [electronic resource] :  |b selected, peer reviewed papers from the 6th International Symposium on Silicon Science and 2nd International Conference on Advanced Micro-Device Engineering (ISSS&AMDE 2010), December 9-10, 2010, Kiryu City Performing Arts Center, Kiryu, Japan /  |c edited by Osamu Hanaizumi, Masafumi Unno and Kenta Miura. 
260 |a Durnten-Zurich :  |b Trans Tech Publications,  |c 2012. 
300 |a 311 p. :  |b ill. (some col.). 
440 0 |a Key engineering materials,  |x 1662-9809 ;  |v v. 497 
504 |a Includes bibliographical references and indexes. 
533 |a Electronic reproduction.  |b Palo Alto, Calif. :  |c ebrary,  |d 2011.  |n Available via World Wide Web.  |n Access may be limited to ebrary affiliated libraries. 
650 0 |a Silicon  |v Congresses. 
650 0 |a Nanostructures  |v Congresses. 
650 0 |a Microelectronics  |v Congresses. 
655 7 |a Electronic books.  |2 local 
700 1 |a Hanaizumi, Osamu. 
700 1 |a Unno, Masafumi. 
700 1 |a Miura, Kenta. 
710 2 |a ebrary, Inc. 
711 2 |a International Conference on Advanced Micro-Device Engineering  |n (2nd :  |d 2010 :  |c Kiryū-shi, Japan) 
856 4 0 |u http://site.ebrary.com/lib/daystar/Doc?id=10604223  |z An electronic book accessible through the World Wide Web; click to view 
908 |a 170314 
942 0 0 |c EB 
999 |c 146327  |d 146327