Silicon science and advanced micro-device engineering II selected, peer reviewed papers from the 6th International Symposium on Silicon Science and 2nd International Conference on Advanced Micro-Device Engineering (ISSS&AMDE 2010), December 9-10, 2010, Kiryu City Performing Arts Center, Kiryu, Japan /
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Corporate Authors: | , , |
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Other Authors: | , , |
Format: | Electronic Conference Proceeding eBook |
Language: | English |
Published: |
Durnten-Zurich :
Trans Tech Publications,
2012.
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Series: | Key engineering materials,
v. 497 |
Subjects: | |
Online Access: | An electronic book accessible through the World Wide Web; click to view |
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020 | |z 9783037852859 | ||
020 | |z 9783038136828 (e-book) | ||
035 | |a (CaPaEBR)ebr10604223 | ||
035 | |a (OCoLC)815478952 | ||
040 | |a CaPaEBR |c CaPaEBR | ||
050 | 1 | 4 | |a TK7871.15.S55 |b H36 2010eb |
111 | 2 | |a International Symposium on Silicon Science |n (6th : |d 2010 : |c Kiryū-shi, Japan) | |
245 | 1 | 0 | |a Silicon science and advanced micro-device engineering II |h [electronic resource] : |b selected, peer reviewed papers from the 6th International Symposium on Silicon Science and 2nd International Conference on Advanced Micro-Device Engineering (ISSS&AMDE 2010), December 9-10, 2010, Kiryu City Performing Arts Center, Kiryu, Japan / |c edited by Osamu Hanaizumi, Masafumi Unno and Kenta Miura. |
260 | |a Durnten-Zurich : |b Trans Tech Publications, |c 2012. | ||
300 | |a 311 p. : |b ill. (some col.). | ||
440 | 0 | |a Key engineering materials, |x 1662-9809 ; |v v. 497 | |
504 | |a Includes bibliographical references and indexes. | ||
533 | |a Electronic reproduction. |b Palo Alto, Calif. : |c ebrary, |d 2011. |n Available via World Wide Web. |n Access may be limited to ebrary affiliated libraries. | ||
650 | 0 | |a Silicon |v Congresses. | |
650 | 0 | |a Nanostructures |v Congresses. | |
650 | 0 | |a Microelectronics |v Congresses. | |
655 | 7 | |a Electronic books. |2 local | |
700 | 1 | |a Hanaizumi, Osamu. | |
700 | 1 | |a Unno, Masafumi. | |
700 | 1 | |a Miura, Kenta. | |
710 | 2 | |a ebrary, Inc. | |
711 | 2 | |a International Conference on Advanced Micro-Device Engineering |n (2nd : |d 2010 : |c Kiryū-shi, Japan) | |
856 | 4 | 0 | |u http://site.ebrary.com/lib/daystar/Doc?id=10604223 |z An electronic book accessible through the World Wide Web; click to view |
908 | |a 170314 | ||
942 | 0 | 0 | |c EB |
999 | |c 146327 |d 146327 |