Silicon science and advanced micro-device engineering II selected, peer reviewed papers from the 6th International Symposium on Silicon Science and 2nd International Conference on Advanced Micro-Device Engineering (ISSS&AMDE 2010), December 9-10, 2010, Kiryu City Performing Arts Center, Kiryu, Japan /
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Corporate Authors: | , , |
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Other Authors: | , , |
Format: | Electronic Conference Proceeding eBook |
Language: | English |
Published: |
Durnten-Zurich :
Trans Tech Publications,
2012.
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Series: | Key engineering materials,
v. 497 |
Subjects: | |
Online Access: | An electronic book accessible through the World Wide Web; click to view |
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