Silicon science and advanced micro-device engineering II selected, peer reviewed papers from the 6th International Symposium on Silicon Science and 2nd International Conference on Advanced Micro-Device Engineering (ISSS&AMDE 2010), December 9-10, 2010, Kiryu City Performing Arts Center, Kiryu, Japan /

Bibliographic Details

Corporate Authors:	International Symposium on Silicon Science Kiryū-shi, Japan, ebrary, Inc, International Conference on Advanced Micro-Device Engineering
Other Authors:	Hanaizumi, Osamu, Unno, Masafumi, Miura, Kenta
Format:	Electronic Conference Proceeding eBook
Language:	English
Published:	Durnten-Zurich : Trans Tech Publications, 2012.
Series:	Key engineering materials, v. 497
Subjects:	Silicon > Congresses. Nanostructures > Congresses. Microelectronics > Congresses. Electronic books.
Online Access:	An electronic book accessible through the World Wide Web; click to view
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