Silicon science and advanced micro-device engineering I selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan /
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| Corporate Authors: | , , , , |
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| Other Authors: | , |
| Format: | Electronic Conference Proceeding eBook |
| Language: | English |
| Published: |
Stafa-Zurich ; Enfield, N.H. :
Trans Tech Publications,
2011.
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| Series: | Key engineering materials,
v. 459 |
| Subjects: | |
| Online Access: | An electronic book accessible through the World Wide Web; click to view |
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