Silicon science and advanced micro-device engineering I selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan /

Dettagli Bibliografici

Enti autori:	International Symposium on Silicon Science Kiryū-shi, Japan, Gunma Daigaku. International Education and Research Center for Silicon Science, Gunma Daigaku. Advanced Technology Research Center, ebrary, Inc, International Conference on Advanced Micro-Device Engineering
Altri autori:	Hanaizumi, Osamu, Unno, Masafumi
Natura:	Elettronico Atti del Convegno eBook
Lingua:	inglese
Pubblicazione:	Stafa-Zurich ; Enfield, N.H. : Trans Tech Publications, 2011.
Serie:	Key engineering materials, v. 459
Soggetti:	Silicon > Congresses. Nanostructures > Congresses. Microelectronics > Congresses. Electronic books.
Accesso online:	An electronic book accessible through the World Wide Web; click to view
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