Low-k nanoporous interdielectrics materials, thin film fabrications, structures and properties /
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| Autor principal: | |
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| Altres autors: | , |
| Format: | Electrònic eBook |
| Idioma: | anglès |
| Publicat: |
Hauppauge, N.Y. :
Nova Science Publishers,
c2010.
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| Col·lecció: | Nanotechnology science and technology series.
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| Matèries: | |
| Accés en línia: | An electronic book accessible through the World Wide Web; click to view |
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