Sputtering materials for VLSI and thin film devices /

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Bibliographic Details
Main Author:	Sarkar, Jaydeep
Format:	Electronic eBook
Language:	English
Published:	Oxford ; Boston : William Andrew Publishing, 2014.
Edition:	First edition.
Subjects:	Microelectronics > Materials. Flat panel displays > Materials. Sputtering (Physics) Electronic books.
Online Access:	An electronic book accessible through the World Wide Web; click to view
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