Sputtering materials for VLSI and thin film devices /
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Main Author: | |
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Format: | Electronic eBook |
Language: | English |
Published: |
Oxford ; Boston :
William Andrew Publishing,
2014.
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Edition: | First edition. |
Subjects: | |
Online Access: | An electronic book accessible through the World Wide Web; click to view |
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Physical Description: | 1 online resource (614 pages) : illustrations |
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Bibliography: | Includes bibliographical references and index. |
ISBN: | 9780815519874 (ebook) |