Sarkar, J. (2014). Sputtering materials for VLSI and thin film devices (First edition.). William Andrew Publishing.
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Cita Chicago (17th ed.)
Sarkar, Jaydeep. Sputtering Materials for VLSI and Thin Film Devices. First edition. Oxford ; Boston: William Andrew Publishing, 2014.
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Cita MLA (9th ed.)
Sarkar, Jaydeep. Sputtering Materials for VLSI and Thin Film Devices. First edition. William Andrew Publishing, 2014.
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