Sputtering materials for VLSI and thin film devices /
Enregistré dans:
| Auteur principal: | |
|---|---|
| Format: | Électronique eBook |
| Langue: | anglais |
| Publié: |
Oxford ; Boston :
William Andrew Publishing,
2014.
|
| Édition: | First edition. |
| Sujets: | |
| Accès en ligne: | An electronic book accessible through the World Wide Web; click to view |
| Tags: |
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| 020 | |a 9780815519874 (ebook) | ||
| 020 | |z 9780815515937 (hbk.) | ||
| 035 | |a (CaPaEBR)ebr10800153 | ||
| 040 | |a CaPaEBR |b eng |e rda |e pn |c CaPaEBR | ||
| 050 | 1 | 4 | |a TK7871 |b .S37 2012eb |
| 082 | 0 | 4 | |a 621.381 |2 22 |
| 100 | 1 | |a Sarkar, Jaydeep. | |
| 245 | 1 | 0 | |a Sputtering materials for VLSI and thin film devices / |c by Jaydeep Sarkar. |
| 250 | |a First edition. | ||
| 264 | 1 | |a Oxford ; |a Boston : |b William Andrew Publishing, |c 2014. | |
| 300 | |a 1 online resource (614 pages) : |b illustrations | ||
| 336 | |a text |2 rdacontent | ||
| 337 | |a computer |2 rdamedia | ||
| 338 | |a online resource |2 rdacarrier | ||
| 504 | |a Includes bibliographical references and index. | ||
| 588 | |a Description based on print version record. | ||
| 590 | |a Electronic reproduction. Palo Alto, Calif. : ebrary, 2013. Available via World Wide Web. Access may be limited to ebrary affiliated libraries. | ||
| 650 | 0 | |a Microelectronics |x Materials. | |
| 650 | 0 | |a Flat panel displays |x Materials. | |
| 650 | 0 | |a Sputtering (Physics) | |
| 655 | 0 | |a Electronic books. | |
| 776 | 0 | 8 | |i Print version: |a Sarkar, Jaydeep. |t Sputtering materials for VLSI and thin film devices. |d Oxford : William Andrew Publishing, 2014 |h x, 603 pages : illustrations ; 24 cm. |z 9780815515937 |
| 797 | 2 | |a ebrary. | |
| 856 | 4 | 0 | |u http://site.ebrary.com/lib/daystar/Doc?id=10800153 |z An electronic book accessible through the World Wide Web; click to view |
| 908 | |a 170314 | ||
| 942 | 0 | 0 | |c EB |
| 999 | |c 165977 |d 165977 | ||