Sputtering materials for VLSI and thin film devices /

Sputtering materials for VLSI and thin film devices /

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Bibliographic Details
Main Author: Sarkar, Jaydeep
Format: Electronic eBook
Language:English
Published: Oxford ; Boston : William Andrew Publishing, 2014.
Edition:First edition.
Subjects:
Microelectronics > Materials.
Flat panel displays > Materials.
Sputtering (Physics)
Electronic books.
Online Access:An electronic book accessible through the World Wide Web; click to view
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MARC

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100 1 |a Sarkar, Jaydeep. 
245 1 0 |a Sputtering materials for VLSI and thin film devices /  |c by Jaydeep Sarkar. 
250 |a First edition. 
264 1 |a Oxford ;  |a Boston :  |b William Andrew Publishing,  |c 2014. 
300 |a 1 online resource (614 pages) :  |b illustrations 
336 |a text  |2 rdacontent 
337 |a computer  |2 rdamedia 
338 |a online resource  |2 rdacarrier 
504 |a Includes bibliographical references and index. 
588 |a Description based on print version record. 
590 |a Electronic reproduction. Palo Alto, Calif. : ebrary, 2013. Available via World Wide Web. Access may be limited to ebrary affiliated libraries. 
650 0 |a Microelectronics  |x Materials. 
650 0 |a Flat panel displays  |x Materials. 
650 0 |a Sputtering (Physics) 
655 0 |a Electronic books. 
776 0 8 |i Print version:  |a Sarkar, Jaydeep.  |t Sputtering materials for VLSI and thin film devices.  |d Oxford : William Andrew Publishing, 2014  |h x, 603 pages : illustrations ; 24 cm.  |z 9780815515937 
797 2 |a ebrary. 
856 4 0 |u http://site.ebrary.com/lib/daystar/Doc?id=10800153  |z An electronic book accessible through the World Wide Web; click to view 
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