Low-k nanoporous interdielectrics materials, thin film fabrications, structures and properties /

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Bibliographic Details
Main Author:	Ree, Moonhor
Corporate Author:	ebrary, Inc
Other Authors:	Yoon, Jinhwan, Heo, Kyuyoung
Format:	Electronic eBook
Language:	English
Published:	Hauppauge, N.Y. : Nova Science Publishers, c2010.
Series:	Nanotechnology science and technology series.
Subjects:	Dielectric films. Microelectronics > Materials. Porous materials. Interconnects (Integrated circuit technology) Electronic books.
Online Access:	An electronic book accessible through the World Wide Web; click to view
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