Low-k nanoporous interdielectrics materials, thin film fabrications, structures and properties /
Saved in:
| Main Author: | |
|---|---|
| Corporate Author: | |
| Other Authors: | , |
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Hauppauge, N.Y. :
Nova Science Publishers,
c2010.
|
| Series: | Nanotechnology science and technology series.
|
| Subjects: | |
| Online Access: | An electronic book accessible through the World Wide Web; click to view |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
MARC
| LEADER | 00000nam a2200000 a 4500 | ||
|---|---|---|---|
| 001 | 0000166136 | ||
| 005 | 20171002063316.0 | ||
| 006 | m u | ||
| 007 | cr cn||||||||| | ||
| 008 | 100506s2010 nyuad sb 001 0 eng d | ||
| 010 | |z 2010016713 | ||
| 020 | |z 9781616687496 (softcover) | ||
| 020 | |z 9781617283185 (e-book) | ||
| 035 | |a (CaPaEBR)ebr10675006 | ||
| 035 | |a (OCoLC)711000608 | ||
| 040 | |a CaPaEBR |c CaPaEBR | ||
| 050 | 1 | 4 | |a TK7871.15.F5 |b R44 2010eb |
| 082 | 0 | 4 | |a 621.381 |2 22 |
| 100 | 1 | |a Ree, Moonhor. | |
| 245 | 1 | 0 | |a Low-k nanoporous interdielectrics |h [electronic resource] : |b materials, thin film fabrications, structures and properties / |c Moonhor Ree, Jinhwan Yoon and Kyuyoung Heo. |
| 260 | |a Hauppauge, N.Y. : |b Nova Science Publishers, |c c2010. | ||
| 300 | |a 67 p. : |b ill. | ||
| 490 | 1 | |a Nanotechnology science and technology | |
| 504 | |a Includes bibliographical references (p. [51]-61) and index. | ||
| 533 | |a Electronic reproduction. |b Palo Alto, Calif. : |c ebrary, |d 2013. |n Available via World Wide Web. |n Access may be limited to ebrary affiliated libraries. | ||
| 650 | 0 | |a Dielectric films. | |
| 650 | 0 | |a Microelectronics |x Materials. | |
| 650 | 0 | |a Porous materials. | |
| 650 | 0 | |a Interconnects (Integrated circuit technology) | |
| 655 | 7 | |a Electronic books. |2 local | |
| 700 | 1 | |a Yoon, Jinhwan. | |
| 700 | 1 | |a Heo, Kyuyoung. | |
| 710 | 2 | |a ebrary, Inc. | |
| 830 | 0 | |a Nanotechnology science and technology series. | |
| 856 | 4 | 0 | |u http://site.ebrary.com/lib/daystar/Doc?id=10675006 |z An electronic book accessible through the World Wide Web; click to view |
| 908 | |a 170314 | ||
| 942 | 0 | 0 | |c EB |
| 999 | |c 155281 |d 155281 | ||