Silicon science and advanced micro-device engineering I selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan /

Bibliografiset tiedot

Yhteisötekijät:	International Symposium on Silicon Science Kiryū-shi, Japan, Gunma Daigaku. International Education and Research Center for Silicon Science, Gunma Daigaku. Advanced Technology Research Center, ebrary, Inc, International Conference on Advanced Micro-Device Engineering
Muut tekijät:	Hanaizumi, Osamu, Unno, Masafumi
Aineistotyyppi:	Elektroninen Konferenssijulkaisu E-kirja
Kieli:	englanti
Julkaistu:	Stafa-Zurich ; Enfield, N.H. : Trans Tech Publications, 2011.
Sarja:	Key engineering materials, v. 459
Aiheet:	Silicon > Congresses. Nanostructures > Congresses. Microelectronics > Congresses. Electronic books.
Linkit:	An electronic book accessible through the World Wide Web; click to view
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