Silicon science and advanced micro-device engineering I selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan /
Guardat en:
| Autor corporatiu: | , , , , |
|---|---|
| Altres autors: | , |
| Format: | Electrònic Actes de congresos eBook |
| Idioma: | anglès |
| Publicat: |
Stafa-Zurich ; Enfield, N.H. :
Trans Tech Publications,
2011.
|
| Col·lecció: | Key engineering materials,
v. 459 |
| Matèries: | |
| Accés en línia: | An electronic book accessible through the World Wide Web; click to view |
| Etiquetes: |
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MARC
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| 007 | cr cn||||||||| | ||
| 008 | 120510s2011 sz a sb 101 0 eng d | ||
| 010 | |z 2012405162 | ||
| 020 | |z 9780878492176 (pbk.) | ||
| 020 | |z 0878492178 (pbk.) | ||
| 020 | |z 9780878492176 | ||
| 020 | |z 9783038134817 (e-book) | ||
| 035 | |a (CaPaEBR)ebr10604228 | ||
| 035 | |a (OCoLC)815479009 | ||
| 040 | |a CaPaEBR |c CaPaEBR | ||
| 050 | 1 | 4 | |a TK7871.15.S55 |b I585 2009eb |
| 082 | 0 | 4 | |a 621.381 |2 23 |
| 111 | 2 | |a International Symposium on Silicon Science |n (5th : |d 2009 : |c Kiryū-shi, Japan) | |
| 245 | 1 | 0 | |a Silicon science and advanced micro-device engineering I |h [electronic resource] : |b selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan / |c edited by Osamu Hanaizumi and Masafumi Unno. |
| 246 | 3 | 0 | |a 5th International Symposium on Silicon Science |
| 246 | 3 | |a Fifth International Symposium on Silicon Science | |
| 246 | 3 | 0 | |a International Symposium on Silicon Science |
| 246 | 3 | 0 | |a 1st International Conference on Advanced Micro-Device Engineering |
| 246 | 3 | |a First International Conference on Advanced Micro-Device Engineering | |
| 246 | 3 | 0 | |a International Conference on Advanced Micro-Device Engineering |
| 246 | 3 | 0 | |a ISSS & AMDE 2009 |
| 246 | 1 | 3 | |a ISSS 2009 |
| 246 | 3 | 0 | |a AMDE 2009 |
| 260 | |a Stafa-Zurich ; |a Enfield, N.H. : |b Trans Tech Publications, |c 2011. | ||
| 300 | |a xii, 282 p. : |b ill. | ||
| 440 | 0 | |a Key engineering materials, |x 1013-9826 ; |v v. 459 | |
| 504 | |a Includes bibliographical references and indexes. | ||
| 533 | |a Electronic reproduction. |b Palo Alto, Calif. : |c ebrary, |d 2011. |n Available via World Wide Web. |n Access may be limited to ebrary affiliated libraries. | ||
| 650 | 0 | |a Silicon |v Congresses. | |
| 650 | 0 | |a Nanostructures |v Congresses. | |
| 650 | 0 | |a Microelectronics |v Congresses. | |
| 655 | 7 | |a Electronic books. |2 local | |
| 700 | 1 | |a Hanaizumi, Osamu. | |
| 700 | 1 | |a Unno, Masafumi. | |
| 710 | 2 | |a Gunma Daigaku. |b International Education and Research Center for Silicon Science. | |
| 710 | 2 | |a Gunma Daigaku. |b Advanced Technology Research Center. | |
| 710 | 2 | |a ebrary, Inc. | |
| 711 | 2 | |a International Conference on Advanced Micro-Device Engineering |n (1st : |d 2009 : |c Kiryū-shi, Japan) | |
| 856 | 4 | 0 | |u http://site.ebrary.com/lib/daystar/Doc?id=10604228 |z An electronic book accessible through the World Wide Web; click to view |
| 908 | |a 170314 | ||
| 942 | 0 | 0 | |c EB |
| 999 | |c 146329 |d 146329 | ||