Silicon science and advanced micro-device engineering I selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan /

書誌詳細

共著者:	International Symposium on Silicon Science Kiryū-shi, Japan, Gunma Daigaku. International Education and Research Center for Silicon Science, Gunma Daigaku. Advanced Technology Research Center, ebrary, Inc, International Conference on Advanced Micro-Device Engineering
その他の著者:	Hanaizumi, Osamu, Unno, Masafumi
フォーマット:	電子媒体 会議録 eBook
言語:	英語
出版事項:	Stafa-Zurich ; Enfield, N.H. : Trans Tech Publications, 2011.
シリーズ:	Key engineering materials, v. 459
主題:	Silicon > Congresses. Nanostructures > Congresses. Microelectronics > Congresses. Electronic books.
オンライン･アクセス:	An electronic book accessible through the World Wide Web; click to view
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