Silicon science and advanced micro-device engineering I selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan /
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| Corporate Authors: | , , , , |
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| Andre forfattere: | , |
| Format: | Electronisk Conference Proceeding eBog |
| Sprog: | engelsk |
| Udgivet: |
Stafa-Zurich ; Enfield, N.H. :
Trans Tech Publications,
2011.
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| Serier: | Key engineering materials,
v. 459 |
| Fag: | |
| Online adgang: | An electronic book accessible through the World Wide Web; click to view |
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Silicon science and advanced micro-device engineering I selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference...
Udgivet 2011.
An electronic book accessible through the World Wide Web; click to view
Electronisk
Conference Proceeding
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