Precursors and defect control for halogenated CVD of thick SiC epitaxial layers /
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| Glavni avtor: | |
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| Format: | Elektronski eKnjiga |
| Jezik: | angleščina |
| Izdano: |
Linkoping, Sweden :
Linkoping University,
2014.
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| Serija: | Linkoping studies in science and technology. Dissertations ;
Number 1625. |
| Teme: | |
| Online dostop: | Click to View |
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