Handbook of silicon based MEMS materials and technologies
Wedi'i Gadw mewn:
| Awdur Corfforaethol: | |
|---|---|
| Awduron Eraill: | |
| Fformat: | Electronig eLyfr |
| Iaith: | Saesneg |
| Cyhoeddwyd: |
Amsterdam ; Boston :
William Andrew/Elsevier,
2010.
|
| Rhifyn: | 1st ed. |
| Cyfres: | Micro & nano technologies.
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| Pynciau: | |
| Mynediad Ar-lein: | An electronic book accessible through the World Wide Web; click to view |
| Tagiau: |
Dim Tagiau, Byddwch y cyntaf i dagio'r cofnod hwn!
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Eitemau Tebyg: Handbook of silicon based MEMS materials and technologies
- Silicon carbide micro electromechanical systems for harsh environments
- MEMS-based integrated navigation
- Understanding MEMS : principles and applications /
- Reliability of MEMS testing of materials and devices /
- Micro electro mechanical systems (MEMS) technology, fabrication processes and applications /
- Hermeticity testing of MEMS and microelectronic packages /