Reliability of MEMS testing of materials and devices /

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Bibliographic Details
Corporate Author:	ebrary, Inc
Other Authors:	Tabata, Osamu, Tsuchiya, Toshiyuki
Format:	Electronic eBook
Language:	English
Published:	Weinheim : Wiley-VCH, 2013.
Series:	Advanced micro & nanosystems.
Subjects:	Microelectromechanical systems > Reliability. Electronic books.
Online Access:	An electronic book accessible through the World Wide Web; click to view
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