Reliability of MEMS testing of materials and devices /
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| Corporate Author: | |
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| Other Authors: | , |
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Weinheim :
Wiley-VCH,
2013.
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| Series: | Advanced micro & nanosystems.
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| Subjects: | |
| Online Access: | An electronic book accessible through the World Wide Web; click to view |
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| Item Description: | First edition 2007. |
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| Physical Description: | xx, 303 p. : ill. |
| Bibliography: | Includes bibliographical references and index. |