Reliability of MEMS testing of materials and devices /
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| Corporate Author: | |
|---|---|
| Other Authors: | , |
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Weinheim :
Wiley-VCH,
2013.
|
| Series: | Advanced micro & nanosystems.
|
| Subjects: | |
| Online Access: | An electronic book accessible through the World Wide Web; click to view |
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| 007 | cr cn||||||||| | ||
| 008 | 130410s2013 gw a sb 001 0 eng d | ||
| 020 | |z 9783527335015 | ||
| 035 | |a (CaPaEBR)ebr10682369 | ||
| 035 | |a (OCoLC)847543932 | ||
| 040 | |a CaPaEBR |c CaPaEBR | ||
| 050 | 1 | 4 | |a TK7875 |b .R45 2013eb |
| 082 | 0 | 4 | |a 539.60113 |2 23 |
| 245 | 0 | 0 | |a Reliability of MEMS |h [electronic resource] : |b testing of materials and devices / |c edited by Osamu Tabata, Toshiyuki Tsuchiya. |
| 260 | |a Weinheim : |b Wiley-VCH, |c 2013. | ||
| 300 | |a xx, 303 p. : |b ill. | ||
| 490 | 1 | |a Advanced micro & nanosystems | |
| 500 | |a First edition 2007. | ||
| 504 | |a Includes bibliographical references and index. | ||
| 533 | |a Electronic reproduction. |b Palo Alto, Calif. : |c ebrary, |d 2013. |n Available via World Wide Web. |n Access may be limited to ebrary affiliated libraries. | ||
| 650 | 0 | |a Microelectromechanical systems |x Reliability. | |
| 655 | 7 | |a Electronic books. |2 local | |
| 700 | 1 | |a Tabata, Osamu. | |
| 700 | 1 | |a Tsuchiya, Toshiyuki. | |
| 710 | 2 | |a ebrary, Inc. | |
| 830 | 0 | |a Advanced micro & nanosystems. | |
| 856 | 4 | 0 | |u http://site.ebrary.com/lib/daystar/Doc?id=10682369 |z An electronic book accessible through the World Wide Web; click to view |
| 908 | |a 170314 | ||
| 942 | 0 | 0 | |c EB |
| 999 | |c 156790 |d 156790 | ||