Handbook of silicon based MEMS materials and technologies
Saved in:
| Corporate Author: | |
|---|---|
| Other Authors: | |
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Amsterdam ; Boston :
William Andrew/Elsevier,
2010.
|
| Edition: | 1st ed. |
| Series: | Micro & nano technologies.
|
| Subjects: | |
| Online Access: | An electronic book accessible through the World Wide Web; click to view |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
MARC
| LEADER | 00000nam a2200000Ia 4500 | ||
|---|---|---|---|
| 001 | 0000119487 | ||
| 005 | 20171002060348.0 | ||
| 006 | m u | ||
| 007 | cr cn||||||||| | ||
| 008 | 090710s2010 ne a sb 001 0 eng d | ||
| 020 | |z 9780815515944 (hbk.) | ||
| 020 | |z 0815515944 (hbk.) | ||
| 035 | |a (CaPaEBR)ebr10378866 | ||
| 035 | |a (OCoLC)667288128 | ||
| 040 | |a CaPaEBR |c CaPaEBR | ||
| 050 | 1 | 4 | |a TK7875 |b .H36 2010eb |
| 245 | 0 | 0 | |a Handbook of silicon based MEMS materials and technologies |h [electronic resource] / |c Veikko Lindroos ... [et al.]. |
| 250 | |a 1st ed. | ||
| 260 | |a Amsterdam ; |a Boston : |b William Andrew/Elsevier, |c 2010. | ||
| 300 | |a xxxii, 636 p. : |b ill. | ||
| 490 | 1 | |a Micro & nano technologies | |
| 504 | |a Includes bibliographical references and index. | ||
| 533 | |a Electronic reproduction. |b Palo Alto, Calif. : |c ebrary, |d 2011. |n Available via World Wide Web. |n Access may be limited to ebrary affiliated libraries. | ||
| 650 | 0 | |a Microelectromechanical systems. | |
| 650 | 0 | |a Microelectromechanical systems |x Materials. | |
| 650 | 0 | |a Silicon |x Electric properties. | |
| 655 | 7 | |a Electronic books. |2 local | |
| 700 | 1 | |a Lindroos, Veikko. | |
| 710 | 2 | |a ebrary, Inc. | |
| 830 | 0 | |a Micro & nano technologies. | |
| 856 | 4 | 0 | |u http://site.ebrary.com/lib/daystar/Doc?id=10378866 |z An electronic book accessible through the World Wide Web; click to view |
| 908 | |a 170314 | ||
| 942 | 0 | 0 | |c EB |
| 999 | |c 108636 |d 108636 | ||