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Tohutoro APA (7th ed.)
ebrary, Inc, & Lindroos, V. (2010). Handbook of silicon based MEMS materials and technologies. William Andrew/Elsevier.
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Tohutoru Kātū Chicago (17th ed.)
ebrary, Inc, me Veikko Lindroos. Handbook of Silicon Based MEMS Materials and Technologies. Amsterdam ; Boston: William Andrew/Elsevier, 2010.
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Tohutoro MLA (9th ed.)
ebrary, Inc, me Veikko Lindroos. Handbook of Silicon Based MEMS Materials and Technologies. William Andrew/Elsevier, 2010.
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