ebrary, Inc, & Lindroos, V. (2010). Handbook of silicon based MEMS materials and technologies. William Andrew/Elsevier.
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Citación estilo Chicago
ebrary, Inc, and Veikko Lindroos. Handbook of Silicon Based MEMS Materials and Technologies. Amsterdam ; Boston: William Andrew/Elsevier, 2010.
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Cita MLA
ebrary, Inc, and Veikko Lindroos. Handbook of Silicon Based MEMS Materials and Technologies. William Andrew/Elsevier, 2010.
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