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Silicon carbide micro electromechanical systems for harsh environments

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Bibliographic Details
Corporate Author: ebrary, Inc
Other Authors: Cheung, Rebecca
Format: Electronic eBook
Language:English
Published: London : Imperial College Press, c2006.
Subjects:
Microelectromechanical systems.
Silicon carbide.
Electronic books.
Online Access:An electronic book accessible through the World Wide Web; click to view
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An electronic book accessible through the World Wide Web; click to view

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