Lithography main techniques /

"Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologie...

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Bibliografiske detaljer

Institution som forfatter:	ebrary, Inc
Andre forfattere:	Landis, Stefan
Format:	Electronisk eBog
Sprog:	engelsk
Udgivet:	London : Hoboken, N.J. : ISTE ; Wiley, 2011.
Fag:	Microlithography. Electronic books.
Online adgang:	An electronic book accessible through the World Wide Web; click to view
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