Lithography main techniques /
"Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologie...
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| 企业作者: | |
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| 格式: | 电子 电子书 |
| 语言: | 英语 |
| 出版: |
London : Hoboken, N.J. :
ISTE ; Wiley,
2011.
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| 主题: | |
| 在线阅读: | An electronic book accessible through the World Wide Web; click to view |
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| 总结: | "Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components"-- |
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| Item Description: | Adapted and updated from Lithography published 2010 in France by Hermes Science/Lavoisier. |
| 实物描述: | xxv, 377 p. : ill. (some col.) |
| 参考书目: | Includes bibliographical references and index. |