Lithography main techniques /
"Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and...
Kaydedildi:
| Müşterek Yazar: | |
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| Diğer Yazarlar: | |
| Materyal Türü: | Elektronik Ekitap |
| Dil: | İngilizce |
| Baskı/Yayın Bilgisi: |
London : Hoboken, N.J. :
ISTE ; Wiley,
2011.
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| Konular: | |
| Online Erişim: | An electronic book accessible through the World Wide Web; click to view |
| Etiketler: |
Etiket eklenmemiş, İlk siz ekleyin!
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| Özet: | "Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components"-- |
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| Diğer Bilgileri: | Adapted and updated from Lithography published 2010 in France by Hermes Science/Lavoisier. |
| Fiziksel Özellikler: | xxv, 377 p. : ill. (some col.) |
| Bibliyografya: | Includes bibliographical references and index. |