Lithography main techniques /
"Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and...
Guardat en:
| Autor corporatiu: | |
|---|---|
| Altres autors: | |
| Format: | Electrònic eBook |
| Idioma: | anglès |
| Publicat: |
London : Hoboken, N.J. :
ISTE ; Wiley,
2011.
|
| Matèries: | |
| Accés en línia: | An electronic book accessible through the World Wide Web; click to view |
| Etiquetes: |
Sense etiquetes, Sigues el primer a etiquetar aquest registre!
|
| Sumari: | "Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components"-- |
|---|---|
| Descripció de l’ítem: | Adapted and updated from Lithography published 2010 in France by Hermes Science/Lavoisier. |
| Descripció física: | xxv, 377 p. : ill. (some col.) |
| Bibliografia: | Includes bibliographical references and index. |