Lithography main techniques /

"Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and...

Whakaahuatanga katoa

I tiakina i:
Ngā taipitopito rārangi puna kōrero
Kaituhi rangatōpū: ebrary, Inc
Ētahi atu kaituhi: Landis, Stefan
Hōputu: Tāhiko īPukapuka
Reo:Ingarihi
I whakaputaina: London : Hoboken, N.J. : ISTE ; Wiley, 2011.
Ngā marau:
Urunga tuihono:An electronic book accessible through the World Wide Web; click to view
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Whakaahuatanga
Whakarāpopototanga:"Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components"--
Whakaahutanga tūemi:Adapted and updated from Lithography published 2010 in France by Hermes Science/Lavoisier.
Whakaahuatanga ōkiko:xxv, 377 p. : ill. (some col.)
Rārangi puna kōrero:Includes bibliographical references and index.