Lithography main techniques /

"Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologie...

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Bibliographic Details
Corporate Author: ebrary, Inc
Other Authors: Landis, Stefan
Format: Electronic eBook
Language:English
Published: London : Hoboken, N.J. : ISTE ; Wiley, 2011.
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Online Access:An electronic book accessible through the World Wide Web; click to view
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