Lithography main techniques /

"Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologie...

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書目詳細資料

企業作者:	ebrary, Inc
其他作者:	Landis, Stefan
格式:	電子 電子書
語言:	英语
出版:	London : Hoboken, N.J. : ISTE ; Wiley, 2011.
主題:	Microlithography. Electronic books.
在線閱讀:	An electronic book accessible through the World Wide Web; click to view
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