Precursors and defect control for halogenated CVD of thick SiC epitaxial layers /

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Bibliografski detalji
Glavni autor:	Yazdanfar, Milan (Autor)
Format:	Elektronički e-knjiga
Jezik:	engleski
Izdano:	Linkoping, Sweden : Linkoping University, 2014.
Serija:	Linkoping studies in science and technology. Dissertations ; Number 1625.
Teme:	Silicon carbide > Research. Electronic books.
Online pristup:	Click to View
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Precursors and defect control for halogenated CVD of thick SiC epitaxial layers / od Yazdanfar, Milan

Izdano 2014.

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Elektronički e-knjiga