Precursors and defect control for halogenated CVD of thick SiC epitaxial layers /

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Bibliographic Details
Main Author:	Yazdanfar, Milan (Author)
Format:	Electronic eBook
Language:	English
Published:	Linkoping, Sweden : Linkoping University, 2014.
Series:	Linkoping studies in science and technology. Dissertations ; Number 1625.
Subjects:	Silicon carbide > Research. Electronic books.
Online Access:	Click to View
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Precursors and defect control for halogenated CVD of thick SiC epitaxial layers / by Yazdanfar, Milan

Published 2014

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Electronic eBook