Precursors and defect control for halogenated CVD of thick SiC epitaxial layers /

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Bibliografski detalji
Glavni autor: Yazdanfar, Milan (Autor)
Format: Elektronički e-knjiga
Jezik:engleski
Izdano: Linkoping, Sweden : Linkoping University, 2014.
Serija:Linkoping studies in science and technology. Dissertations ; Number 1625.
Teme:
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Precursors and defect control for halogenated CVD of thick SiC epitaxial layers / od Yazdanfar, Milan

Izdano 2014.
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Elektronički e-knjiga