Yazdanfar, M. (2014). Precursors and defect control for halogenated CVD of thick SiC epitaxial layers. Linkoping University.
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Chicago Style (17th ed.) Citation
Yazdanfar, Milan. Precursors and Defect Control for Halogenated CVD of Thick SiC Epitaxial Layers. Linkoping, Sweden: Linkoping University, 2014.
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MLA引文
Yazdanfar, Milan. Precursors and Defect Control for Halogenated CVD of Thick SiC Epitaxial Layers. Linkoping University, 2014.
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