Precursors and defect control for halogenated CVD of thick SiC epitaxial layers /
Gorde:
| Egile nagusia: | |
|---|---|
| Formatua: | Baliabide elektronikoa eBook |
| Hizkuntza: | ingelesa |
| Argitaratua: |
Linkoping, Sweden :
Linkoping University,
2014.
|
| Saila: | Linkoping studies in science and technology. Dissertations ;
Number 1625. |
| Gaiak: | |
| Sarrera elektronikoa: | Click to View |
| Etiketak: |
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