Precursors and defect control for halogenated CVD of thick SiC epitaxial layers /
Furkejuvvon:
| Váldodahkki: | |
|---|---|
| Materiálatiipa: | Elektrovnnalaš E-girji |
| Giella: | eaŋgalasgiella |
| Almmustuhtton: |
Linkoping, Sweden :
Linkoping University,
2014.
|
| Ráidu: | Linkoping studies in science and technology. Dissertations ;
Number 1625. |
| Fáttát: | |
| Liŋkkat: | Click to View |
| Fáddágilkorat: |
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