Precursors and defect control for halogenated CVD of thick SiC epitaxial layers /
Wedi'i Gadw mewn:
| Prif Awdur: | |
|---|---|
| Fformat: | Electronig eLyfr |
| Iaith: | Saesneg |
| Cyhoeddwyd: |
Linkoping, Sweden :
Linkoping University,
2014.
|
| Cyfres: | Linkoping studies in science and technology. Dissertations ;
Number 1625. |
| Pynciau: | |
| Mynediad Ar-lein: | Click to View |
| Tagiau: |
Dim Tagiau, Byddwch y cyntaf i dagio'r cofnod hwn!
|
| Disgrifiad Corfforoll: | 1 online resource (63 pages) : illustrations. |
|---|---|
| Llyfryddiaeth: | Includes bibliographical references. |
| ISBN: | 9789175192130 (e-book) |
| ISSN: | 0345-7524 ; |