Precursors and defect control for halogenated CVD of thick SiC epitaxial layers /
Shranjeno v:
| Glavni avtor: | |
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| Format: | Elektronski eKnjiga |
| Jezik: | angleščina |
| Izdano: |
Linkoping, Sweden :
Linkoping University,
2014.
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| Serija: | Linkoping studies in science and technology. Dissertations ;
Number 1625. |
| Teme: | |
| Online dostop: | Click to View |
| Oznake: |
Brez oznak, prvi označite!
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| Fizični opis: | 1 online resource (63 pages) : illustrations. |
|---|---|
| Bibliografija: | Includes bibliographical references. |
| ISBN: | 9789175192130 (e-book) |
| ISSN: | 0345-7524 ; |