Precursors and defect control for halogenated CVD of thick SiC epitaxial layers /
Sábháilte in:
| Príomhchruthaitheoir: | |
|---|---|
| Formáid: | Leictreonach Ríomhleabhar |
| Teanga: | Béarla |
| Foilsithe / Cruthaithe: |
Linkoping, Sweden :
Linkoping University,
2014.
|
| Sraith: | Linkoping studies in science and technology. Dissertations ;
Number 1625. |
| Ábhair: | |
| Rochtain ar líne: | Click to View |
| Clibeanna: |
Níl clibeanna ann, Bí ar an gcéad duine le clib a chur leis an taifead seo!
|
| Cur síos fisiciúil: | 1 online resource (63 pages) : illustrations. |
|---|---|
| Leabharliosta: | Includes bibliographical references. |
| ISBN: | 9789175192130 (e-book) |
| ISSN: | 0345-7524 ; |