Precursors and defect control for halogenated CVD of thick SiC epitaxial layers /
I tiakina i:
| Kaituhi matua: | |
|---|---|
| Hōputu: | Tāhiko īPukapuka |
| Reo: | Ingarihi |
| I whakaputaina: |
Linkoping, Sweden :
Linkoping University,
2014.
|
| Rangatū: | Linkoping studies in science and technology. Dissertations ;
Number 1625. |
| Ngā marau: | |
| Urunga tuihono: | Click to View |
| Ngā Tūtohu: |
Kāore He Tūtohu, Me noho koe te mea tuatahi ki te tūtohu i tēnei pūkete!
|
| Whakaahuatanga ōkiko: | 1 online resource (63 pages) : illustrations. |
|---|---|
| Rārangi puna kōrero: | Includes bibliographical references. |
| ISBN: | 9789175192130 (e-book) |
| ISSN: | 0345-7524 ; |